产品[
日本YAMATO等离子清洗机IV600
]资料
如果您对该产品感兴趣的话,可以
产品名称:
日本YAMATO等离子清洗机IV600
产品型号:
IV600
产品展商:
安捷来国际股份（香港）有限公司
简单介绍
yamato等离子清洗机IV600
日本YAMATO等离子清洗机IV600的详细介绍
| IV600(Magazineto Magazine process) |  |
| MagazinetoMagazineplasma process |
Specifications |
| Model | IV600 |
|---|
| Plasmamethod | RIE | | Electrodestructure | ForMagazinecorrespondence electrode structure | | RFgenerator | 100-600W | | Oscillatingfrequency | 13.56MHz | | Controlsystem | LCDtouchpanelwith PLC | | Chambersize | (W)230×(D)400×(H)200mm | | Chambermaterial | Aluminum | | Reactiongas | O2,Ar | | Purge gas | N2orDryair | | Flow meter | Mass flowcontrol2line | | Vacuumpump | 1000L/min | | Gas system | 2line(Reactiongas) , 1 line (Purge gas) | | Externaldimension | (W)1,000×(D)900×(H)970mm | | Powersupply | AC200/220/380V3phase 10A |
|