产品[
日本YAMATO等离子清洗机PR300/301
]资料
如果您对该产品感兴趣的话,可以
产品名称:
日本YAMATO等离子清洗机PR300/301
产品型号:
PR300/PR301
产品展商:
安捷来国际股份（香港）有限公司
简单介绍
小型等离子清洗机PR300/PR301，广泛被应用在半导体材料的灰化、蚀刻、干式清洗等方面，外形小巧，价格经济、
日本YAMATO等离子清洗机PR300/301的详细介绍
| Low Temperature Asher
|
| PR300/PR301 |
| Model
|
| 300
| 301
|
| Method
|
Barrel type of DP
DP : direct plasma
|
| High-frequency Output
|
| Max.300W
|
| Oscillating Frequency
|
| 13.56MHz
|
| Reaction Chamber
|
ø64×160mm
3 chambers
| ø118×160mm
1 chamber |
|
The PR 300 isagasplasma device that is used widely for suchapplicationsasproduction of semiconductors and analysis work.Itboastsoutstanding operabi lity and safety, with anautomatictuningsystem as a standard component and other features.It has acompactdesign, with a small-size HF generator and anoscillationsectionintegrated with a portion of the chamber,allowing it tobeinstalled into a 19-inch rack.
- Three 64mm diameterchambersareincluded. (PR300)
- The unit can be set for awiderangeof output conditions to handle a variety oftestingsamples.
- One 118mm diameter largechamberisaccommodated.
|
 The gas plasmaequipment has a wide range ofapplications fromashing, etching,dry cleaning,etc. |
 Reaction Chamber
|
| 
|
| Control Panel
|
|
| |
| Operation Flowchart
|
|
| Piping System Diagram (PR300)
|
 |
| Specifications
|
| Model
| PR300
| PR301
|
 Method
| Barrel type of direct plasma
|
| Controlpart
|
| Highfrequency output
| 300Wvariable (100W×3 chambers)
|
| Oscillating frequency
| 13.56MHz
|
| Outputimpedance
| 50Ω
|
| Tuningmethod
| Manual biaxial tuning method
|
| Instrument
| Output watt meter (0 to 300W)
Reflected wave watt meter (0 to 100W)
Vacuum gauge, bourdon's tube type
Flow meter, needle valve integrated type, 1 set
|
| Timer
| 0.1sec. to 999h
|
| Gasinlet
| 1/4"stainless steel
|
| Powersource (50/60Hz)
| AC100/220V, single phase, 1 kVA
|
| Reactionpart
|
| Reactionchamber
| Made ofsuperhardglass, ø64×160mm×3 chanbers
| Madeofpyrexglass, ø118×160mm
|
| Electrodestructure
| Condenser type, 2-way split
|
| Controlsystem
| Autopressure reduction, auto leak valve
|
| Pipingmaterial
| Stailesssteel,Teflon, Copper and Brass
| Stainlesssteel,Teflon
|
| Externaldimensions(W×D×Hmm)
| 438×520×556
| 438×520×656
|
| Weight
| Approx.38kg
| Approx. kg
|
| StandardAccessories
|
|
|
- Vacuum grease :1 container
- O-ring for reactionchamber:6pcs.
- Sample dish (large andsmall):each4sets
- Lid for reactionchamber:4sets
- Adapter for ground:1pc.
|
| OptionalAccessories
|
| Sample dish(large) Sample dish (small) Sample shelf Stand | |