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日本YAMATO在线式等离子清洗机ISP500
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产品名称:
日本YAMATO在线式等离子清洗机ISP500
产品型号:
ISP500
产品展商:
安捷来国际股份（香港）有限公司
简单介绍
在线式等离子清洗机
日本YAMATO在线式等离子清洗机ISP500的详细介绍
| Plasma Apparatus |
| ISP500Series |
| Plasma Model | | RIE/DP | RIE : Reactive Ion Etching
DP : Direct Plasma | | RF Generator | | 10 to 500W | | OscillatingFrequency | | 13.56MHz | | Chamber Size (mm) | | 344W×230D×45H |
| In-Line and Stand Alone Type (Strip to Strip process) Outline
Two lead frame(strip)vertical or parallel loading function. Pull out two stripfromMagazine--Loading two strip into the chamber--Plasumacleaningprocess--Unloading two strip from chamber--Strip goes tomagazineor next process to direct.
Total system controlled by PLC controller. LCD touch paneldisplayand operation. Lead frame (strip) size--Up to 25 to80(W)×100 to250(L)×0.2 to 2.5(t)mm also. We can provide CustomizedIn-Lineplasma. Feature - Special electrode built inforgetting good plasma efficient.
- RIE/DP mode selectable
- RF power up to 500W
- All automatic operation
- LCD touch panel andPLCcontrol
- Any chamber sizeareavailable for customer's Lead frameorstrip.
|
| Specifications |
| Model | ISP500 series |
|---|
| Plasmamethod | RIE/DPmode | | RFgenerator | 10 to 500W | | Oscillation frequency | 13.56MHz | | Controlsystem | LCD touchpanelwith PLC | | Tuningmethod | Automatictuning | | Chambersize | 344(W)×230(D)×45(H)mm | | Electrodesize | 250(W)×180(D)mm | | Gassystem | Mass flowcontrol2 line |
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