产品[
日本YAMATO在线式等离子清洗机ISP500
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产品名称:
日本YAMATO在线式等离子清洗机ISP500
产品型号:
ISP500
产品展商:
YAMATO
产品文档:
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简单介绍
日本YAMATO在线式等离子清洗机ISP500
在线式等离子清洗机
在产品内容中有关于日本YAMATO在线式等离子清洗机ISP500的详细介绍。
日本YAMATO在线式等离子清洗机ISP500的详细介绍
日本YAMATO在线式等离子清洗机ISP500:
Plasma Apparatus
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ISP500Series
|
Plasma Model
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RIE/DP
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RIE : Reactive Ion Etching
DP : Direct Plasma
|
RF Generator
|
10 to 500W
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OscillatingFrequency
|
13.56MHz
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Chamber Size (mm)
|
344W×230D×45H
|
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In-Line and Stand Alone Type (Strip to Strip process)
Outline
Two lead frame(strip)vertical or parallel loading function. Pull out two stripfromMagazine--Loading two strip into the chamber--Plasumacleaningprocess--Unloading two strip from chamber--Strip goes tomagazineor next process to direct.
Total system controlled by PLC controller. LCD touch paneldisplayand operation. Lead frame (strip) size--Up to 25 to80(W)×100 to250(L)×0.2 to 2.5(t)mm also. We can provide CustomizedIn-Lineplasma.
Feature
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Special electrode built inforgetting good plasma efficient.
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RIE/DP mode selectable
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RF power up to 500W
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All automatic operation
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LCD touch panel andPLCcontrol
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Any chamber sizeareavailable for customer's Lead frameorstrip.
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Specifications
|
Model
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ISP500 series
|
Plasmamethod
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RIE/DPmode
|
RFgenerator
|
10 to 500W
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Oscillation frequency
|
13.56MHz
|
Controlsystem
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LCD touchpanelwith PLC
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Tuningmethod
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Automatictuning
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Chambersize
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344(W)×230(D)×45(H)mm
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Electrodesize
|
250(W)×180(D)mm
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Gassystem
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Mass flowcontrol2 line
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