产品[
日本YAMATO等离子清洗机V1500X
]资料
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产品名称:
日本YAMATO等离子清洗机V1500X
产品型号:
V1500X
产品展商:
安捷来国际股份（香港）有限公司
简单介绍
大型等离子清洗机V1500X
日本YAMATO等离子清洗机V1500X 的详细介绍
| V1500X |  |
- RIE / DP mode selectable
- Aluminum chamber
- For Magazine CSP/BGA
- LCD Touch panel operation
- Easy to set upparameterandoperation
- Built in safetyfunctionwithEmergency stop switch
|
Specifications |
| Model | V1500X |
|---|
| Plasmamethod | RIE•DPmode | | Electrode | Parallelflatstageplate | | Electrodematerial | SUS-304 | | Chambertemperature | Digitaldisplay | | RFgenerator | 100~1500W | | Oscillation | 13.56MHz | | Controlsystem | LCDTouchpanelwith PLC | | Tuningmethod | AutomaticandManual | | Timer | 1sec-9H59min59sec | | Chambersize | (W)600×(D)550×(H)600mm | | Stage size | (W)460×(D)400mm | | Chambermaterial | Aluminum | | Reactiongas | O2,Ar,CF4 | | Purge gas | N2orDryair | | Flow meter | Mass flowcontrol2line | | Vacuumpump | 1,400L/min | | Emergencystopswitch | Pushtypeswitch | | Gas port | 2 pc(1/4"SUSswage- lock) | | Purge port | 1pc(1/4"SUSswage- lock) | | Vacuumport | 1pc(SUSNW40) | | Externaldimension | (W)900×(D)1,000×(H)1,700mm | | Powersupply | AC200/220/380V3phase 25A | | Weight | Approx.300kg |
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