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日本YAMATO等离子清洗机PB600/PB1000S/PA600D
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产品名称:
日本YAMATO等离子清洗机PB600/PB1000S/PA600D
产品型号:
PB600/PB1000S/PA600D
产品展商:
YAMATO
产品文档:
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简单介绍
日本YAMATO等离子清洗机PB600/PB1000S/PA600D是中型等离子清洗机
等离子清洗机(plasma cleaner)也叫等离子表面处理仪，是一种新的清洗方式，利用等离子体来达到常规清洗方法无法达到的效果。等离子体是物质的一种状态，也叫做物质的第四态。
日本YAMATO等离子清洗机PB600/PB1000S/PA600D的详细介绍
日本YAMATO等离子清洗机PB600/PB1000S/PA600D是中型等离子清洗机
以下是型号的详细介绍：
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Gas Plasma Ashers
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PB600/PB1000S/PA600D
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Model
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PB600
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PB1000S
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PA600D
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Plasma Mode
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DP
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DF
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DP :Direct Plasma
DF : Downflow
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High-frequency Output
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Max.600W
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Max.1000W
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Max.600W
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Oscillating Frequency
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13.56 MHz
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Dimension of Stage(mm)
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ø200×300
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ø300×500
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for6-inch
wafer
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-
The PB series are of barred typeofdirect plasma method, and can be operated automatically bysimplesetting.
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The model PA600is a plasmaashingsystem after the downflow method, which copes with a6-inchwafer.
 Downflow method
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Specifications
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Model
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PB600
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PB1000S
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PA600D
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Plasmamethod
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Barred type of DP mode
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DF mode
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Electrode
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Splitof Opposite electrode structure
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Roundtypeelectrode structure
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RFgenerator
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0 to 600W
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50to1,000W
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0 to 600W
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Oscillating frequency
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13.56MHz
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Controlsystem
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Digitaldisplaywith PLC control
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Touch panelwithPLC
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Digitaldisplaywith one touch operation
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Tuningmethod
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Automatic and Manual tuning
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Timer
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1sec.to 9H 59min.59 sec.
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Chamber
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Madeof quart glass
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Chambersize
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ø200×300mmL
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ø300×500mmL
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Adapt for 6inchwafer
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Chambertemperature
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Digital display
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Reactiongas
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O2,CF4 or others
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O2,Ar,CF4,C5F8,SF6 or others
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Purgegas
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N2 or Dry air
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Flowmeter
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Flow meter1line
(O2 0 to 1,000 ml/min.)
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Massflow control with digital display
(CF4 0 to 300sccm, O2 0 to 1,000sccm)
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Vacuumgauge
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Piranie type
(0.4 to 3,000Pa/0.004 to 30Torr)
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Digital display (0.4 to 3,000Pa/0.004 to 30Torr)
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Vacuumpump
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250ml/min.
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700ml/min.
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Emargencystop switch
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Pushtype switch
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Gasport
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1 line (1/4"SUSSwagelok)
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2line(1/4" SUS Swagelok)
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Purgeport
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1 line (1/4"SUSSwagelok)
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1line(1/4" SUS Swagelok)
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Vacuumport
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1 line (SUSNW25)
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1line( SUS NW25)
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Externaldimensions
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500mmW×600mmD×650mmH
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640mmW×850mmD×1,695mmH
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650mmW×800mmD×1,500mmH
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Powersupply
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AC200/220/380V, 3 phase
and AC100/220V, single phase
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Weight
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Approx.130kg
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Approx.180kg
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Approx.150kg
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