产品[
日本YAMATO等离子清洗机MPC600
]资料
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产品名称:
日本YAMATO等离子清洗机MPC600
产品型号:
MPC600
产品展商:
安捷来国际股份（香港）有限公司
简单介绍
MPC600
日本YAMATO等离子清洗机MPC600的详细介绍
| MPC600 |  |
- RIE • DP mode
- Electrode stage - up to6inch
- RF power is up to MAX. 600W
- One touch control
- Made of quartglasschamber
|
Specifications |
| Model | MPC600 |
|---|
| Method | RIE •DPmode | | Electrode | Aluminumroundtype | | RFgenerator | 50 - 600W | | Oscillatingfrequency | 13.56MHz | | Controlsystem | Digitaldisplaywith one touch operation | | Chamber | Adapted for 6inchwafer | | Chambermaterial | SUS | | Reactiongas | O2,Ar,CF4 | | Purge gas | N2 orDryair | | Flow meter | Massflowcontrol | | Vacuumpump | 5000L/min | | Gas system | 2 line(Reactiongas) , 1 line (Purge) | | Externaldimension | (W)650 x (D)700x(H)1,480mm | | Powersupply | AC200/220/380V3phase 25A |
|