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YAMATO晶圆切割冷却装置

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产品名称: YAMATO晶圆切割冷却装置
产品型号: YY-383/383S
产品展商: 安捷来国际股份(香港)有限公司
简单介绍
晶圆切割冷却装置


YAMATO晶圆切割冷却装置的详细介绍

 

 

ChillerforDicing Saw Machine
YY-383/383S
Model
YY-383YY-383S
OperatingTemperature Range
4°Cto10°C4°Cto20°C
Main Tank Capacity
100 L
Chemical Tank
40L × 3 TanksNone

Equipment summary :

This Chiller issupplyingcoolingwater or chemical coolant for IC packagingDicingSawmachine.

YY-383 model have built inpHmeterand Filter system. pH meter makes easy to keep requiredpHrange withbuilt-in three chemical tanks operate from pHadjustmentswitch infront panel. Filter system removes cutting finedust.Also, thissystem is re-circulating system.
YY-383S model is drain system type which water supplyfromfacilityutility and cooling water out to Dicing Saw. Aftercuttingwatergoes to facility drain.

Feature :

  • pH control (By means of pH monitoringandbuilt-inthree chemical Tank)
  • Filter system
  • Stable output Temperature
  • Use R-407C Freon (ISO 14001 compliance)
  • Large capacity main Tank (100 L)
  • Automatic safetyoperationbyPLC

* Back View
YY-383/383S Back View

YY-383
 
* Main Tank
YY-383 Main Tank
* Three Chemical Tank for pH Control
YY-383 Three Chemical Tank for pH Control


Specifications
 YY-383YY-383S

*Configuration

ExternalmaterialCold-rolledsteelsheet with melamine resin baked-painting
Painting colorYSCstandardcolor(DIC-G-61)
Temperaturerange4°C to 10°C4°C to10°C (dependonsupplywater temp.)
Temperaturecoolingtime60 min (from25°Cto4°C)
TemperaturecontrollerDigitalsetting,digital indication (PID control)
TemperaturesensorPt 100
Refrigerator1.5 kw2.25 kw
Cooling unitStainlesssteelpipecooling unit
RefrigerantR-407C(ISO140001compliance)
PumpImmersiblepump
pHmeterandelectrodeCoolantconcentrationmeasurement----
Float switchLead-typeliquidsurface switch
Pressure gaugePressuregaugewiththe contact switch
Integrationflow-meterDigitaldisplayflowmeter
Water inlet12 mmdia.tubeconnector (with hand valve and solenoid valve)
Coolantorwateroutlet12 mmdia.tubeconnector
Coolantreturninlet40 mm dia.tubeconnector----
DrainPVCpipefitting(with hand valve)
Main tankPVC, 100 L
Filter50 to 100 micronfilter(2Filter)----
Chemicaltank(Threetanks)PVC, 40 L (each tank)----
ExternaldimensionsW900×D1200×H1500mm
*System
TypeRe-circulationDrain
pH controlOKNone
Filter systemOKNone
*ControlPanel
Pressure gaugeAnalogpressuregauge with upper limit contact
Pressure range : 0~1.0MPa Accuracy : ±1%
TemperaturecontrollerDigitalsetting,digital indication (PID control)
pHmeterandelectrodeDigitalsetting,digital indication
System controlControlledbyProgrammable controller (PLC)
Timer99hours59min(arbitrarily set)
EmergencystopswitchMushroomtypelockswitch
LampsAlarmlamps(Temperature, pH, Refrigerator, Pump)opening/stoplamps,Signal tower etc.
*Safety
Over currentProtectbyCircuitbreaker
pH conditionUpperlimitalarmcontact of pH controller with upper-limit contact isconnected,and Lower limit alarm contact of pH controllerwithupper-limitcontact is connected.
RefrigeratorProtectbyThermalrelay
PumpProtectbyThermalrelay and Level sensor
Hi pressureBypressuregaugeupper limit contact
Tank level lowByTanklevelsensor
ShortcircuitbreakerShortcircuit/overcurrent has occurred, the power supply isturnedoff.
*RequiredUtility
Power supplyAC200/220/380V,3-phase50/60Hz,5 KVAAC200/220/380V,3-phase50/60Hz,7 KVA
Water supplyFromfacility






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安捷来国际股份(香港)有限公司
电话:010-59604011/12/13 010-5129-9808/8096-2288/189-101-33988   传真:010-5960-4013
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